Effect of post-annealing on microstructure and electrical properties of BaTiO3 thick films grown by Aerosol Deposition (AD)
Abstract
In this work, we successfully deposited highly dense BaTiO3 thick films at room temperature on kovar ® substrates using aerosol deposition method (AD). As-deposited films exhibited nonferroelectric behavior due to grain size effect. Post-annealing below 800 °C released residual stress without promoting grain growth for both air and argon annealing atmospheres. Hence, it enhanced relative permittivity, electrical resistivity (10 12 Ω.cm) and reduced leakage currents (<1 µA.cm-2). Annealing at 800 and 900 °C induced significant grain growth, favoring the recovery of ferroelectric properties. Grain growth was further enhanced for argon-annealed BT films. For annealing temperatures ≥ 800 °C, both air and argon annealing induced a piezoelectric behavior, clearly evidenced by the strainfield (S-E) cycles. The 900 °C argonannealed film exhibited the highest properties, with a Pr of ~6.6 µC.cm-2 and a maximum strain of 0.04% under 10 kV.mm-1 .
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